Vacuum Products Canada Inc.

Authorized Distributor of    LDLD Didactic GmbH

                 Home Contact Us Site Map                                               

Turbomolecular Pumps
Turbopump Systems

We accept VISA, MasterCard, American Express and Debit Cards

Turbomolecular Pumps and Systems

Turbomolecular Pumps

Turbomolecular pumps from Leybold generate a clean high and ultra-high vacuum, are easy to operate and are exceptionally reliable. In connection with a well rated backing pump, pressures below 10-10 mbar (0.75 x 10-10 Torr) can be attained. 

Oerlikon Leybold Vacuum offers two product lines:

  1. TURBOVAC line - Turbomolecular pumps with mechanical rotor suspension
  2. TURBOVAC MAG line - Turbomolecular pumps with magnetic rotor suspension

Each of the two product lines contains “classic” turbomolecular pumps as well as turbomolecular pumps with a compound stage.  Leybold is one of the world’s leading manufacturer of turbomolecular pumps. Consequently, the TURBOVAC and the TURBOVAC MAG pumps are successfully used in many applications.  

The TURBOVAC pumps are turbomolecular pumps with mechanical rotor suspension which are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-10 Torr). Pumping speeds for air vary from 35 l x s-1 to 1,600 l x s-1 (inlet flange diameter 40 to 250 mm (1.57 to 9.84 in.)). Through the compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.  In particular the TURBOVAC pumps are very successfully operated in mass spectroscopy applications, gas and liquid chromatographic analysis, CD, DVD and hard disk production, manufacturing of large-surface optical layers, and non-corrosive semiconductor fabrication processes.   

The most important advantages of the TURBOVAC product line are:

Oil-free pumps for the generation of clean high and ultra-high vacuum conditions
Highly performance in any orientation
Highly degree of operating reliability
Easy to operate
Compact design
The TURBOVAC MAG pumps are turbomolecular pumps with magnetic rotor suspension which are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-10 Torr).  Pumping speeds for air vary from 300 l x s-1 to 2,000 l x s-1 (inlet flange diameter 100 to 250 mm (3.94 to 9.84 in.)).  The TURBOVAC MAG pumps are mostly installed on semiconductor processing lines like etching, CVD, PVD and ion implantation, i.e. in applications where corrosive gases need to be pumped. Also electron beam microscopy is an important area of application for these pumps.

The most important advantages of the TURBOVAC MAG product line are:

Hydrocarbon-free pumps for the generation of clean high and ultrahigh vacuum conditions
High performance in any orientation
High degree of operating reliability
Extremely low vibration
Designed for pumping of corrosive gases  

Leybold Expertise

The world-wide success of the TURBOVAC MAG product line results from more than 25 years of experience of Leybold in the development and manufacturing of turbomolecular pumps with magnetically levitated rotors.  In 1976 Leybold started the market introduction of the famous TURBOVAC 560 M. This was the first magnetically levitated turbomolecular pump which became commercially available. Nowadays Leybold uses two design principles for the magnetic rotor suspension. 

One axis with active bearing - The rotor is suspended by permanent magnets and by electromagnets. The TURBOVAC 340 M and the MAG 400 are fitted with such a type of rotor suspension.
Five axes with active bearings - The rotor position is actively controlled by electromagnets in all 5 degrees of freedom. The TURBOVAC MAG 830/1300, MAG 1500, MAG 2000, MAG 2200 and MAG 2800/3200 are equipped with such a bearing system.

Turbomolecular Pumping Systems

wpe16.gif (10811 bytes)
We offer a range of turn-key turbomolecular pump vacuum systems based on standard components.  The frame is included as well as turbopump, frequency converter, roughing pump and all components necessary to run a turbo system.  Systems are available fully assembled and leak checked or in a kit for do-it-yourself economy.  Various configurations include basic models, fully-automatic models with vacuum gauges and fully dry models.  The options make it easy for you to choose the system that is best for your application needs and budget.  Go to the Systems Catalogue link on the left for more information.

  You will need Adobe Acrobat Reader to view the Leybold catalogue.  Click one of the links on the left to view the catalogue sections.

Vacuum Products Canada Inc.    www.vpcinc.ca    1-800-269-6030    reachus@vpcinc.ca    
Copyright Vacuum Products Canada Inc.                                                                                                                                                                                                                                       
Last Modified Wednesday, March 21, 2012