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Vacuum Components and Control
Vacuum Products Canada Inc. supplies a wide range of vacuum fittings,
feedthroughs, valves, measurement and control systems. If you need smart
vacuum sensors, displays or gas dosing systems, we can help you build a control
system that suits your needs. Whether fully automated digital or analog,
we have the system that is right for you.
Total Pressure Gauges
Today, the total range of vacuum pressure accessible to
measurement extends from atmospheric pressure (about 1000 mbar (750 Torr)) down
to 10-12 mbar/Torr, i.e. it extends over 15 powers of ten. The
instruments used for measuring the pressure within this wide range are called
vacuum gauges. For physical reasons it is not possible to create a single vacuum
technology through which it might be possible to perform quantitative
measurements within the entire pressure range. Therefore, a variety of
different vacuum gauges are available, each with their own characteristic
measurement range which commonly extends over several powers of ten. A
distinction is made between direct and indirect pressure measurements. In the
case of direct (or absolute) pressure measurements, the readings obtained
through the vacuum gauge are independent of the type of gas and the pressure
which is to be measured. Mechanical vacuum gauges are those where the
pressure is determined directly by recording the force acting on the surface of
a diaphragm. In the case of indirect pressure measurements the pressure is
determined as a function of a pressure dependant property of the gas (thermal
conductivity, ionization probability, for example). These properties do not only
depend on the pressure, but also on the molar mass of the gases. For this
reason, the pressure readings obtained through vacuum gauges which rely on
indirect pressure measurements, depend on the type of gas. The readings usually
relate to air or nitrogen as the measurement gas. For the measurement of other
vapors or gases the corresponding correction factors must be applied.
Valves
We select and design valves and vacuum
protection components for a wide variety of applications. The range of products
is such that a reliable solution can be offered for every vacuum engineering
application. Many years of service and the reliability of the valves is ensured
by design. Oerlikon Leybold vacuum valves are well-proven in many
widely varying areas of research and industry.
Scope of the Range of Valves
The range of Oerlikon Leybold Vacuum valves
includes:
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Small valves micro |
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Right-angle and straight-through
valves (no slanted seat valve) with a nominal width of DN 16 to DN 40 with
ISO-KF flanges |
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Right-angle valves with a nominal
width of DN 63 to DN 250 with ISO-K flanges |
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Gate valves with a nominal width of DN
16 to DN 250 with various flanges |
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Butterfly valves |
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Ball valves |
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Gas dosing valves and systems |
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Venting Valves |
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Safety valves |
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Pressure Relief valves |
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Special valves |
All valves are available with different
driving systems. With the exception of the
special valves you may select between a stepped
rotary knob manual drive, an electro pneumatic drive or an electro-magnetic
drive system. Right-angle valves DN 16 ISO-KF to
We offer short switching cycles (e.g. 1.5
s) and a very high number of opening and switching cycles (e.g. over 10 million
cycles), high conductance (similar to the
corresponding flange components, like bends, for example), high integral leak
tightness for the valves (leak rates below 10-9
mbar l/s) and materials capable of resisting
radiation, high temperatures and corrosion at the same time.
Our valves are designed for quiet opening
action with very little vibration, are compact in design, with low weight and
highly visible, unambiguous position indicators.
Fittings, Feedthroughs and Components
Vacuum systems (i.e. systems for pressures ranging from 2.5 bar
to 10-9 mbar (1.9 x 10-3 Torr to 0.75 x 10-9
Torr)) are quickly and easily assembled owing to the modular construction
principle which is based on interchangeable standard components by means of
vacuum-tight, demountable flange connections. Individual components may be
exchanged easily at any time. Depending on the intended use and size of the
connection, flanges of different types have been developed. The KF flange
connection was developed by Oerlikon Leybold Vacuum many years ago and has been
widely accepted by all users of vacuum equipment. This product section lists all
flange connections and fittings including adaptors for ultra-high vacuum
components. Components marked with [< 1000 mbar (< 750 Torr)] are not
allowed for use at pressures exceeding 1000 mbar abs. The components and flange
connections are intended for use in connection with vacuum systems. They have
not been designed to support mechanical loads. All loads must be supported
separately at the connection components.
High-Vacuum Components
According to DIN 28 400, the term “Ultra-high Vacuum (UHV)”
designates the pressure range below 10-7 mbar. Several physical
quantities, such as mean free path, monolayer time, flow density of the
particles impinging on the walls, leak rate and the degassing rate are of
significance in the characterization of this pressure range. In order to
attain or maintain pressures below 10-7 mbar, the vapour pressure of
the pump fluid or lubricant should be in accordance with the desired ultimate
pressure and the leak and degassing rates of the entire apparatus must be
extremely low. Generally, both leak rate and backstreaming effects through the
pump can be kept at sufficiently low levels by using suitable UHV sealing
materials and pumps.
Advantages to the User
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High reliability |
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Special knife edge profiles ensure the highest degree of
leak tightness |
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Flange connection can be baked out up to 450 °C |
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Easy to assemble, helium-tight |
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Symmetrical flange connection |
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Equal sealing profiles |
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Small outside diameter with respect to the nominal width |
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Can be joined by welding or brazing using any desired
process, also with other nickel chromium steel grades |
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For use either with a flat gasket made of OFHC copper (oxygenfree)
or FPM O-ring |
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Self-centering |
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Fixed and rotary flanges in almost any size |
A sufficiently low outgassing rate can only be achieved by
baking out the entire apparatus at temperatures of about 300 °C for a long
period of time. It is only under these conditions that the mono-layers of atoms
or molecules, which attach quite firmly to the surfaces of the vacuum apparatus
including its installations, are desorbed. Consequently, components for UHV
systems are generally made of stainless steel. Metal gaskets, ceramic
feedthroughs and bakeable observation windows are used exclusively. For
applications in the extreme UHV range (XHV) the outgassing rate of the CF
flanges and the UHV components can be reduced by about two orders of magnitude
by a special degassing process. The high standard of development and manufacture
combined with the use of high quality materials guarantee that UHV components
from Oerlikon Leybold Vacuum are able to meet even the most demanding
requirements. |