Ultra, High and Medium Vacuum

We provide solutions for the generation of low, medium up to ultra-high vacuum. From a few inches of mercury (Torr) up to the low E-11 or even lower, we have solutions for industrial or scientific applications. With pumping capacities from a few liters per minutes up to several thousands of cubic meters per hour, our application engineers will help with conductance, effective pumping speed and throughput calculations.

For Industrial applications, we can provide standard or chemical/explosion resistant pumping systems for steel degassing, electron beam welding, refrigerant or brake fluid evacuation, cryostats conditioning, solvent and material production, freeze drying, plasma sterilization and many other fields.

Products:

  • Rotary Vane Pumps
  • Screw Pumps
  • Roots Pumps
  • Turbopumps
  • Multi-Stage Roots Pumps
  • Pumping stations.

For Research and Development (R&D), we can provide innovative and reliable solutions for fusion reactors, material analysis, mass spectrometry, leak detection, particle accelerators and beam lines, laboratory vacuum, surface analysis and coating, respiratory gas analysis, space simulation and so many others.

Products:

  • Rotary Vane Pumps
  • Diaphragm Pumps
  • Multi-Stage Roots Pumps
  • Turbomolecular pumps
  • Roots Pumps
  • Pumping stations.

For the Semiconductor industry we can provide dedicated products for Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), Lithography, Etching, ion Implantation, Inspection and analysis, load-locks evacuation and even contamination management.

Products:

  • Side channel pumps
  • Multi-Stage Roots Pumps
  • Turbopumps

For the Coating industry we have a large expertise and applications resources to provide solution for hard coating, reflectors, architectural glass coating, functional and decorative coatings, thin film, solar cells and wafers, LED, OLED and applications like storage media.

Products:

  • Screw pumps
  • Multi-Stage Roots Pumps
  • Pumping Stations
  • Turbopumps

For the Analytical industry we are positioned, with our vendors, as key players in the market. The compact design, low noise and vibration operation, high pressure stability and high reliability of our pumps as well as the worldwide service and support that we can provide serves the mass spectrometry, gas analysis, electron microscopy and surface analysis industry like no others.

Products:

  • Rotary Vane pumps
  • Diaphragm Pumps
  • Multi-Stage Roots Pumps
  • Turbomolecular Pumps